Application Examples
Suitable for low speed and high torque applications.
Coating and vapor deposition systems
![Coating and vapor deposition systems](https://www.mitsubishielectric.com/fa/products/drv/servo/pmerit/mr_j5/case/images/use_img03.jpg)
Spin-type cleaning systems for FPD/
semiconductor
![Spin-type cleaning systems for FPD/semiconductor](https://www.mitsubishielectric.com/fa/products/drv/servo/pmerit/mr_j5/case/images/use_img04.jpg)
FPD/semiconductor testing systems (XYθ tables)
![FPD/semiconductor testing systems (XYθ tables)](https://www.mitsubishielectric.com/fa/products/drv/servo/pmerit/mr_j5/case/images/use_img05.jpg)
Index table for machine tools
![Index table for machine tools](https://www.mitsubishielectric.com/fa/products/drv/servo/pmerit/mr_j5/case/images/use_img01.jpg)
Rotary axis for polishing systems
![Rotary axis for polishing systems](https://www.mitsubishielectric.com/fa/products/drv/servo/pmerit/mr_j5/case/images/use_img06.jpg)
Rotary axis for material handling robots
![Rotary axis for material handling robots](https://www.mitsubishielectric.com/fa/products/drv/servo/pmerit/mr_j5/case/images/use_img02.jpg)